Enhancing temperature stability of ALD-deposited IGZO thin-film transistor by optimizing composition ratio
Jianting Wu; Huajian Zheng; Min Guo; Yi Huang; Xiaoci Liang; Qian Wu; Chuan Liu
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Alloys and Compounds
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jallcom.2025.179753
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Cite this source
Jianting Wu; Huajian Zheng; Min Guo; Yi Huang; Xiaoci Liang; Qian Wu; Chuan Liu. Enhancing temperature stability of ALD-deposited IGZO thin-film transistor by optimizing composition ratio. Journal of Alloys and Compounds. 2025-04. https://doi.org/10.1016/j.jallcom.2025.179753