Investigation of Chlorine-Induced Damage in Oxide Semiconductor Transistors
Jae Won Na; Seungbin Lee; Hyeonhong Min; Gwanghyeon Jang; Minseop Song; I. Sak Lee; Jong-Heon Yang; Min Jung Kim; Kwun-Bum Chung; Si Joon Kim
- Published
- Publisher
- Elsevier BV
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.2139/ssrn.5217922
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Cite this source
Jae Won Na; Seungbin Lee; Hyeonhong Min; Gwanghyeon Jang; Minseop Song; I. Sak Lee; Jong-Heon Yang; Min Jung Kim; Kwun-Bum Chung; Si Joon Kim. Investigation of Chlorine-Induced Damage in Oxide Semiconductor Transistors. Elsevier BV. 2025. https://doi.org/10.2139/ssrn.5217922