A Data-Driven Approach for Improving Energy Efficiency in a Semiconductor Manufacturing Plant
Zhao Hong; Chew Ze Yong; Kosasih Lucky; Goh Jun Rong; Wang Joheng
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Semiconductor Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tsm.2024.3483781
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Cite this source
Zhao Hong; Chew Ze Yong; Kosasih Lucky; Goh Jun Rong; Wang Joheng. A Data-Driven Approach for Improving Energy Efficiency in a Semiconductor Manufacturing Plant. IEEE Transactions on Semiconductor Manufacturing. 2024-11. https://doi.org/10.1109/tsm.2024.3483781