Remote plasma assisted processing and semiconductor interface electronic structure
Leonard J. Brillson
- Published
- Publisher
- American Vacuum Society
- Journal / collection
- Journal of Vacuum Science & Technology A
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1116/6.0004200
The original publisher provides the full text and its access options.
Cite this source
Leonard J. Brillson. Remote plasma assisted processing and semiconductor interface electronic structure. Journal of Vacuum Science & Technology A. 2025-01-17. https://doi.org/10.1116/6.0004200