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Research literature / Conference paper

TEM Sample Preparation for Electron Microscopy Characterization and Failure Analysis of Advanced Semiconductor Devices

Cecile S. Bonifacio

Published
Publisher
ASM International
Journal / collection
International Symposium for Testing and Failure Analysis
Research area
Semiconductors
Source type
Conference paper
DOI
10.31399/asm.cp.istfa2024tpn1

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Cecile S. Bonifacio. TEM Sample Preparation for Electron Microscopy Characterization and Failure Analysis of Advanced Semiconductor Devices. International Symposium for Testing and Failure Analysis. 2024-10-28. https://doi.org/10.31399/asm.cp.istfa2024tpn1

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