Modeling and Feasibility Study of a Micro-Machined Microphone Based on the Piezoresistive Effect of a Field-Effect Transistor
Chayeong Kim; Eunsik Noh; Kumjae Shin; Wonkyu Moon
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Sensors Journal
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/jsen.2024.3394948
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Cite this source
Chayeong Kim; Eunsik Noh; Kumjae Shin; Wonkyu Moon. Modeling and Feasibility Study of a Micro-Machined Microphone Based on the Piezoresistive Effect of a Field-Effect Transistor. IEEE Sensors Journal. 2024-06-15. https://doi.org/10.1109/jsen.2024.3394948