V-TimesNet: Vision-Augmented TimesNet for Improved Anomaly Detection in Semiconductor Plasma Dry Etching
Ruoxin Wang; Dai-yan Ji; Changlin Liu; Jay Lee
- Published
- Publisher
- Elsevier BV
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.2139/ssrn.5955781
This is a preprint or other posted paper. Check the original source for its review and publication status.
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Cite this source
Ruoxin Wang; Dai-yan Ji; Changlin Liu; Jay Lee. V-TimesNet: Vision-Augmented TimesNet for Improved Anomaly Detection in Semiconductor Plasma Dry Etching. Elsevier BV. 2025. https://doi.org/10.2139/ssrn.5955781