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Research literature / Preprint / posted paper

A Domain-Specialized Framework for Semantic Embedding and Retrieval of Semiconductor Equipment Logs

Jihun Nam; Jaehee Kim; Pilsung Kang

Published
Publisher
Elsevier BV
Research area
Semiconductors
Source type
Preprint / posted paper
DOI
10.2139/ssrn.5800425

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Jihun Nam; Jaehee Kim; Pilsung Kang. A Domain-Specialized Framework for Semantic Embedding and Retrieval of Semiconductor Equipment Logs. Elsevier BV. 2025. https://doi.org/10.2139/ssrn.5800425

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