Ablation morphology and defect analysis of Ti thin film irradiated by femto- and picosecond laser for fine ablation of Micro-LED display thin film transistor repair
Junha Choi; Sung-Hak Cho
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Applied Physics A
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s00339-024-07714-1
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Cite this source
Junha Choi; Sung-Hak Cho. Ablation morphology and defect analysis of Ti thin film irradiated by femto- and picosecond laser for fine ablation of Micro-LED display thin film transistor repair. Applied Physics A. 2024-07-09. https://doi.org/10.1007/s00339-024-07714-1