Slowflows: Progress Towards a Novel Flow Standard for Semiconductor Process Gases
Jodie Gail Pope; Keith A. Gillis; Aaron N. Johnson; Joey T. Boyd
- Published
- Publisher
- Elsevier BV
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.2139/ssrn.4941975
This is a preprint or other posted paper. Check the original source for its review and publication status.
The original publisher provides the full text and its access options.
Cite this source
Jodie Gail Pope; Keith A. Gillis; Aaron N. Johnson; Joey T. Boyd. Slowflows: Progress Towards a Novel Flow Standard for Semiconductor Process Gases. Elsevier BV. 2024. https://doi.org/10.2139/ssrn.4941975