Deep reinforcement learning framework for end-to-end semiconductor process control
Thomas Hirtz; He Tian; Shazrah Shahzad; Fan Wu; Yi Yang; Tian-Ling Ren
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Neural Computing and Applications
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s00521-024-09710-1
The original publisher provides the full text and its access options.
Cite this source
Thomas Hirtz; He Tian; Shazrah Shahzad; Fan Wu; Yi Yang; Tian-Ling Ren. Deep reinforcement learning framework for end-to-end semiconductor process control. Neural Computing and Applications. 2024-04-21. https://doi.org/10.1007/s00521-024-09710-1