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Research literature

Search 51,794 external bibliographic records by title, author, journal, publisher or DOI. Follow the document link for its full text and current publication status.

10,780 results · 10,549–10,560

Journal article · Semiconductors

High-precision laser confocal measurement of semiconductor wafer thickness

Optics and Precision Engineering ·

Zhaoyu LI; 北京理工大学 光电学院 复杂环境智能感测技术工信部重点实验室,北京 100081 MIIT Key Laboratory of Complex-field Intelligent Exploration, Beijing Institute of Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China; Zihao LIU et al.

Bibliographic information is supplied by publishers through Crossref. Source types are shown separately; preprints are not presented as peer-reviewed articles. Access to the full work depends on the publisher.